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The sensor was fabricated as an open-circuit, Archimedean spiral composed of copper on a flexible, polyimide substrate.

MEMS Resonant Sensors for Real-Time Thin Film Shear Stress Monitoring

The sensor is interrogated by a two-loop antenna connected to a vector network analyzer VNA to monitor the scattering parameter response of the sensor when exposed to varying ionic concentrations. The sensor response was defined in terms of the resonant frequency and the peak-to-peak amplitude of the transmission scattering parameter profile S Potassium chloride KCl solutions with concentrations in the range of nM — 4.

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The resonant sensors demonstrated an ion-specific response, caused by the variations in the relative permittivity of the solution, which was also a function of the resonator geometry. A lumped circuit model, which fit the experimental data well, confirms signal transduction via change in solution permittivity. Also, a ternary ionic mixture composed of potassium nitrate KNO 3 , ammonium nitrate NH 4 NO 3 , and ammonium phosphate NH 4 H 2 PO 4 response surface was constructed by testing 21 mixture variations on three different sensor geometries and the phase and magnitude of scattering parameters were monitored.

It was determined that the orthogonal responses presented by resonant sensor arrays can be used for quantifying levels of target ions in ternary mixtures. The surface of the Bionetic plate is nanostructured and designed to reflect a particular wavelength of light at a specific angle Figure 2a.

Resonant silicon sensors

A wavelength shift occurs Figure 2b during the biochemical interaction — and the results are displayed in real-time on the screen. Figure 2. The optical resonant modes are two different polarizations of light that are excited on the sensor surface and used to probe the binding reactions.

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Learn more about our technology and unique attributes — contact us for technical papers or speak to an RSI engineer. The innovative sensor technology that is core to all RSI products applies proprietary guided-mode resonance sensing methods invented by RSI founders, and is exclusively licensed to RSI from the University of Texas at Arlington Read More.


Toggle navigation. ResoSens bioassay system. Figure 1.